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Stability under Gate Bias Stressing of Amorphous Oxide Thin Film Transistors

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Niang, KM 
Flewitt, AJ 

Abstract

Stability of amorphous zinc tin oxide thin film transistors (TFTs) is investigated under positive bias stressing (PBS) at temperatures between 65 and 105 °C. The time and temperature dependence of the threshold voltage shift is analyzed using a thermalization energy concept. A maximum energy barrier to defect migration of 0.76 eV and the attempt-to-escape frequency of 107 s−1 are extracted. These values are compared with those under PBS of amorphous indium gallium zinc oxide and hydrogenated amorphous silicon TFTs. The oxygen vacancy migration model that was proposed for amorphous oxide semiconductors is contrasted with the defect creation model that was proposed for amorphous silicon.

Description

Keywords

40 Engineering, 4016 Materials Engineering

Journal Title

ECS Transactions

Conference Name

Journal ISSN

1938-5862
1938-5862

Volume Title

75

Publisher

The Electrochemical Society
Sponsorship
Engineering and Physical Sciences Research Council (EP/M013650/1)