A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors
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Peer-reviewed
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Abstract
This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.
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Keywords
mode localized resonant sensor, self-sustained oscillator
Journal Title
Journal of Microelectromechanical Systems
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Journal ISSN
1057-7157
1941-0158
1941-0158
Volume Title
26
Publisher
IEEE
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Sponsorship
Natural Environment Research Council (NE/N012097/1)
Funding from Innovate UK and the Natural Environment
Research Council is gratefully acknowledged.