A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors
Journal of Microelectromechanical Systems
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Zhao, C., Pandit, M., Sun, B., Sobreviela, G., Zou, X., & Seshia, A. (2017). A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors. Journal of Microelectromechanical Systems, 26 (3), 501-503. https://doi.org/10.1109/JMEMS.2017.2690942
This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.
mode localized resonant sensor, self-sustained oscillator
Funding from Innovate UK and the Natural Environment Research Council is gratefully acknowledged.
External DOI: https://doi.org/10.1109/JMEMS.2017.2690942
This record's URL: https://www.repository.cam.ac.uk/handle/1810/265207