Repository logo
 

On the noise optimization of resonant MEMS sensors utilizing vibration mode localization

Accepted version
Peer-reviewed

Type

Article

Change log

Authors

Zhao, C 
Pandit, M 
Sobreviela, G 
Mustafazade, A 
Du, S 

Abstract

jats:pIn this letter, we experimentally demonstrate the existence of an optimal operating region in a resonant microelectromechanical systems sensor utilizing the principle of vibration mode localization, to achieve ultra-high resolution amplitude ratio measurements. We have shown analytically that the coupling strength and stiffness mismatch between the two resonators are primary parameters that influence the resolution of the amplitude ratio measurements within such a sensor. Using this optimization strategy, a minimum noise spectral density equivalent to 16 ppb/Hz1∕2 in terms of normalized stiffness perturbation is experimentally demonstrated. This is by far the best resolution achieved in this type of sensor. These results can be used to aid the design of future high resolution sensor employing mode localization.</jats:p>

Description

Keywords

40 Engineering, 51 Physical Sciences

Journal Title

Applied Physics Letters

Conference Name

Journal ISSN

0003-6951
1077-3118

Volume Title

112

Publisher

AIP Publishing
Sponsorship
Natural Environment Research Council (NE/N012097/1)