Closed-loop Characterization of Noise and Stability in a Mode-localized Resonant MEMS Sensor.
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Authors
Pandit, Milind
Zhao, Chun
Sobreviela, Guillermo
Mustafazade, Arif
Zou, Xudong
Seshia, Ashwin A
Publication Date
2018-10-26Journal Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
ISSN
0885-3010
Publisher
IEEE
Language
eng
Type
Article
This Version
AM
Metadata
Show full item recordCitation
Pandit, M., Zhao, C., Sobreviela, G., Mustafazade, A., Du, S., Zou, X., & Seshia, A. A. (2018). Closed-loop Characterization of Noise and Stability in a Mode-localized Resonant MEMS Sensor.. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control https://doi.org/10.1109/TUFFC.2018.2878241
Abstract
This paper presents results from the closed-loop characterization of an electrically coupled mode-localized sensor topology including measurements of amplitude ratios over long duration, stability, noise floor and the bandwidth of operation. The sensitivity of the prototype sensor is estimated to be -5250 in the linear operation regime. An input-referred stability of 84ppb with respect to normalized stiffness perturbations is achieved at 500s. When compared to frequency shift sensing within the same device, amplitude ratio sensing provides higher resolution for long term measurements due to the intrinsic common mode rejection properties of a mode-localized system. A theoretical framework is established to quantify noise floor associated with measurements validated through numerical simulations and experimental data. In addition, the operating bandwidth of the sensor is found to be 3.5Hz for 3dB flatness.
Keywords
Force sensitivity, force sensor, MEMS, resonant sensor, thermal noise
Sponsorship
Natural Environment Research Council (NE/N012097/1)
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Identifiers
External DOI: https://doi.org/10.1109/TUFFC.2018.2878241
This record's URL: https://www.repository.cam.ac.uk/handle/1810/286831
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http://www.rioxx.net/licenses/all-rights-reserved
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