Scalable integration of nano-, and microfluidics with hybrid two-photon lithography.
Microsystems & nanoengineering
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Vanderpoorten, O., Peter, Q., Challa, P., Keyser, U., Baumberg, J., Kaminski, C., & Knowles, T. (2019). Scalable integration of nano-, and microfluidics with hybrid two-photon lithography.. Microsystems & nanoengineering, 5 40. https://doi.org/10.1038/s41378-019-0080-3
Nanofluidic devices have great potential for applications in areas ranging from renewable energy to human health. A crucial requirement for the successful operation of nanofluidic devices is the ability to interface them in a scalable manner with the outside world. Here, we demonstrate a hybrid two photon nanolithography approach interfaced with conventional mask whole-waver UV-photolithography to generate master wafers for the fabrication of integrated micro and nanofluidic devices. Using this approach we demonstrate the fabrication of moulds from SU-8 photoresist with nanofluidic features down to 230 nm lateral width and channel heights from micron to sub-100 nm. Scanning electron microscopy and atomic force microscopy were used to characterize the printing capabilities of the system and show the integration of nanofluidic channels into an existing microfluidic chip design. The functionality of the devices was demonstrated through super-resolution microscopy, allowing the observation of features below the diffraction limit of light produced using our approach. Single molecule localisation of diffusing dye molecules verified the successful imprint of nanochannels and the spatial confinement of molecules to 200 nm across the nanochannel moulded from the master wafer. This approach integrates readily with current microfluidic fabrication methods and allows the combination of microfluidic devices with locally 2-photon-written nano-sized functionalities, enabling rapid nanofluidic device fabrication and enhancement of existing microfluidic device architectures with nanofluidic features.
Is supplemented by: https://doi.org/10.17863/CAM.56135
RCUK | Engineering and Physical Sciences Research Council (EPSRC) - EP/L015889/1 [Vanderpoorten] EC | Horizon 2020 Framework Programme (EU Framework Programme for Research and Innovation H2020) - 674979-NANOTRANS [Peter] ERC Consolidator Grant (DesignerPores 647144) [Keyser]
European Commission Horizon 2020 (H2020) Marie Sk?odowska-Curie actions (674979)
ECH2020 EUROPEAN RESEARCH COUNCIL (ERC) (647144)
European Commission Horizon 2020 (H2020) Future and Emerging Technologies (FET) (766972)
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External DOI: https://doi.org/10.1038/s41378-019-0080-3
This record's URL: https://www.repository.cam.ac.uk/handle/1810/294208
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