Smart CMOS mid-infrared sensor array.
Optical Society of America
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Popa, D., Ali, S. Z., Hopper, R., Dai, Y., & Udrea, F. (2019). Smart CMOS mid-infrared sensor array.. Optics Letters, 44 (17), 4111-4114. https://doi.org/10.1364/OL.44.004111
We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p+ and n+ elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16×16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 μm waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region.
External DOI: https://doi.org/10.1364/OL.44.004111
This record's URL: https://www.repository.cam.ac.uk/handle/1810/296799
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