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Crosstalk Analysis of a CMOS Single Membrane Thermopile Detector Array

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Peer-reviewed

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Authors

Ali, Syed Zeeshan 
Hopper, Richard 
Falco, Claudio 
Pandey, Prakash 

Abstract

We present a new experimental technique to characterise the crosstalk of a thermopile-based thermal imager, based on bi-directional electrical heating of thermopile elements. The new technique provides a significantly simpler and more reliable method to determine the crosstalk, compared to a more complex experimental setup with a laser source. The technique is used to characterise a novel single-chip array, fabricated on a single dielectric membrane. We propose a theoretical model to simulate the crosstalk, which shows good agreement with the experimental results. Our results allow a better understanding of the thermal effects in these devices, which are at the center of a rising market of industrial and consumer applications.

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Keywords

infrared sensor, thermopile, CMOS, MEMS, seebeck effect, crosstalk

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Publisher

MDPI
Sponsorship
EPSRC (EP/S031847/1)