Crosstalk Analysis of a CMOS Single Membrane Thermopile Detector Array
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Peer-reviewed
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Authors
Dai, Ying https://orcid.org/0000-0001-5222-1911
Ali, Syed Zeeshan
Hopper, Richard
Falco, Claudio
Pandey, Prakash
Abstract
We present a new experimental technique to characterise the crosstalk of a thermopile-based thermal imager, based on bi-directional electrical heating of thermopile elements. The new technique provides a significantly simpler and more reliable method to determine the crosstalk, compared to a more complex experimental setup with a laser source. The technique is used to characterise a novel single-chip array, fabricated on a single dielectric membrane. We propose a theoretical model to simulate the crosstalk, which shows good agreement with the experimental results. Our results allow a better understanding of the thermal effects in these devices, which are at the center of a rising market of industrial and consumer applications.
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Keywords
infrared sensor, thermopile, CMOS, MEMS, seebeck effect, crosstalk
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MDPI
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EPSRC (EP/S031847/1)