Supporting data for "Microscopic metallic air-bridge arrays for connecting quantum devices"
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Description
Numerical data in text format, produced by CryoMeas (written by C J B Ford). Fig.1- N/A Fig.2- AFM scans data Fig.3- Contrast curves data for Copolymer, 100k, 495k and 950k Fig.4- Matlab routine for estimating the evolution of the resist profile Fig.5- CryoMeas data files and MatLab routine to load them
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Software / Usage instructions
While the data can be loaded manually, convenient, free programs and scripts are available to load it into MATLAB (from http://www.repository.cam.ac.uk/handle/1810/247429) or Origin (from http://www.repository.cam.ac.uk/handle/1810/247432).
.mat and .m files need MATLAB (or free equivalent GNU Octave from https://www.gnu.org/software/octave/ )
AFM images can be viewed using free software gwyddion from gwyddion.net .
Keywords
Electron-beam lithography, Air-bridge, Water-IPA developer
