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dc.contributor.authorDai, Y
dc.contributor.authorAli, SZ
dc.contributor.authorHopper, R
dc.contributor.authorPopa, D
dc.contributor.authorUdrea, F
dc.date.accessioned2022-01-19T00:31:06Z
dc.date.available2022-01-19T00:31:06Z
dc.date.issued2022
dc.identifier.issn1530-437X
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/332783
dc.description.abstractWe propose a numerical model for efficient design and optimization of a novel infrared (IR) detector array, fabricated on a single micro-electro-mechanical system (MEMS) membrane based on silicon on insulator (SOI) technology. The model is based on a finite element method (FEM) and is used to investigate the effect of heat transfer, at pixel scale, on the thermopile array’s responsivity and crosstalk performance. We show that optimal operational conditions can be achieved by modifying a combination of design elements, including the pixel size, the interpixel metal heatsinking tracks, as well as the insertion of air gaps between pixels. We find that the combined effect of copper heatsinking tracks and that of air gaps can reduce pixel crosstalk by 65% while increasing the responsivity by 6.4%. The model improves our understanding of the thermal effects in these devices, and can serve as a design tool for a growing number of low-cost industrial and consumer applications.
dc.description.sponsorshipEngineering and Physical Sciences Research Council (EPSRC) under Grant EP/S031847/1
dc.publisherInstitute of Electrical and Electronics Engineers
dc.rightsAll Rights Reserved
dc.rights.urihttp://www.rioxx.net/licenses/all-rights-reserved
dc.titleModelling of CMOS Single Membrane Thermopile Detector Arrays
dc.typeArticle
dc.publisher.departmentDepartment of Engineering
dc.date.updated2022-01-18T11:07:54Z
prism.endingPage1
prism.issueIdentifier99
prism.publicationDate2021
prism.publicationNameIEEE Sensors Journal
prism.startingPage1
prism.volumePP
dc.identifier.doi10.17863/CAM.80218
dcterms.dateAccepted2021-12-02
rioxxterms.versionofrecord10.1109/JSEN.2021.3132949
rioxxterms.versionAM
dc.contributor.orcidHopper, Richard [0000-0003-1863-9008]
dc.contributor.orcidPopa, Daniel [0000-0002-5708-743X]
dc.identifier.eissn1558-1748
rioxxterms.typeJournal Article/Review
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/S031847/1)
cam.issuedOnline2021-12-06
cam.orpheus.success2022-01-18 - Embargo set during processing via Fast-track
cam.depositDate2022-01-18
pubs.licence-identifierapollo-deposit-licence-2-1
pubs.licence-display-nameApollo Repository Deposit Licence Agreement
rioxxterms.freetoread.startdate2021-12-25


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