Electron beam induced deposition of 3D cobalt nanowires with simultaneous high metallic content (≈80% at.) and small diameter (<100 nm) has been achieved by optimization of the growth parameters. Two different growth modes have been identified, denoted as radial and linear. In the radial mode, the wire diameter is at least  ≈120 nm and the Co content is greater than  ≈85% at. In the linear mode, the diameter is smaller than 80 nm and the Co content is at best  ≈80% at. A sharp transition between both growth modes can occur inside a single nanowire for certain experimental conditions. Electron holography measurements indicate that in optimized Co nanowires the magnetic induction is high enough for applications in spintronics, magnetic sensing and actuation at the nanoscale.